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X-ray Solutions
Services
- - - Thin Film Analysis
- - - Sirius XRS provides services in the following areas:
      Contract measurements
      
      X-ray Thin Film Analysis
      
      High Resolution X-ray Diffraction (HRXRD)
      
      X-ray Diffraction Analysis (XRD)
      
      Refurbishment
  - - X-ray Reflectivity
      
      In-Plane Grazing incidence
  - - High Resolution X-ray Diffraction
      
      Grazing incidence powder diffraction
  - - Reciprocal space map
      
      Semiconductor Wafer Mapping
- - - Methods Development
      
      Semiconductor X-ray metrology
      
      Thin films analysis
      
      Residual stress
  - - Stress and Texture
  - - X-ray Powder Diffraction
Events
About Us
- - - About Us
      
      Welcome to the “Sirius X-ray Solutions GmbH”. We are a provider of X-ray Analytical Solutions for Material Science and Semiconductor Industries founded in 2015. We are an independent instruments integrator and we work together with established suppliers. We offer complete laboratory solutions to synchrotron users in the area of thin films, surface and in situ – characterization, X-ray semiconductor metrology solutions and services in X-ray diffraction analysis.
  - - Contact
    - Please contact us by e-mail: info@sirius-xrs.com
      
      Our address:
      Sirius X-ray Solutions GmbH
      Neue Strasse 95
      73230 Kirchheim Unter Teck/Nabern
      Germany
  - - How to find us

Methods Development

Sirius XRS provides methods development in the following areas:

Semiconductor X-ray metrology
Thin films analysis
Residual stress

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