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  • X-ray Solutions
        • Solutions

        • Sirius XRS provides solutions in the following areas: Laboratory solutions for synchrotron users, material research and semiconductor X-ray metrology

        • SEMICONDUCTOR & MEMS
        • MATERIAL RESEARCH
        • INGOTS & BARE WAFERS
        • DIAMOND & SINGLE CRYSTAL
        • OPTOELECTRONICS & PHOTONICS
        • SYNCHROTRON USERS
  • Services
        • Thin Film Analysis
          • X-ray Reflectivity
          • High Resolution X-ray Diffraction
          • Reciprocal space maps
          • In-Plane Grazing incidence
          • Grazing incidence powder diffraction
          • Semiconductor Wafer Mapping

        • Sirius XRS provides services in the following areas:
          Contract measurements

          1. X-ray Thin Film Analysis
          2. High Resolution X-ray Diffraction (HRXRD)
          3. X-ray Diffraction Analysis (XRD)

          Refurbishment

        • X-ray Reflectivity

          In-Plane Grazing incidence

        • High Resolution X-ray Diffraction

          Grazing incidence powder diffraction

        • Reciprocal space map

          Semiconductor Wafer Mapping

        • Methods Development

          1. Semiconductor X-ray metrology
          2. Thin films analysis
          3. Residual stress
        • Stress and Texture
        • X-ray Powder Diffraction
  • Events
  • About Us

        • About Us

          Welcome to the “Sirius X-ray Solutions GmbH”.  We are a provider of X-ray Analytical Solutions for Material Science and Semiconductor Industries founded in 2015. We are an independent instruments integrator and we work together with established suppliers. We offer complete laboratory solutions to synchrotron users in the area of thin films, surface and in situ – characterization, X-ray semiconductor metrology solutions and services in X-ray diffraction analysis.

        • Contact

        • Please contact us by e-mail: info@sirius-xrs.com

          Our address:
          Sirius X-ray Solutions GmbH
          Neue Strasse 95
          73230 Kirchheim Unter Teck/Nabern
          Germany

        • How to find us


Solutions

Sirius XRS provides solutions in the following areas:

  • Semiconductor and MEMS
  • Material research
  • Ingots and bare wafers
  • Diamond and single crystal
  • Optoelectronics and photonics
  • Synchrotron users

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